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https://colab.research.google.com/drive/1BBPM0ByacDIXq1wN8oysgc15Hr02sql_
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No more ads after Adguard registration key: Adguard Crack version is a ad-blocking portable internet program and with it you are equipped to act against the online  .1. Field of the Invention
The present invention relates to a method for inspecting an object such as a semiconductor wafer or an LCD substrate, and also to an apparatus for inspecting an object such as a semiconductor wafer or an LCD substrate, and further to a method for fabricating an article and also to an apparatus for fabricating an article. In particular, the present invention relates to an inspection method for an object to be inspected having a stacked structure, and also to an inspection apparatus for an object to be inspected, and further to a method for fabricating an article and also to an apparatus for fabricating an article.
2. Description of the Related Art
A semiconductor wafer, an LCD substrate and the like are fabricated in the following manner.
Semiconductor wafers, LCD substrates and the like are supplied in the form of a multi-layered structure (hereinafter referred to as an article) in which a plurality of layers (hereinafter referred to as a stacked structure) including different layers (e.g., film layers, such as a polycrystalline silicon layer, an oxide layer, a nitride layer and a metal layer, and also electronic parts, such as transistors, diodes and interconnections, and the like) are successively stacked on a surface of a flat plate of, for example, a semiconductor substrate or an insulating substrate, and such a plurality of articles are stacked in a container (e.g., a container made of quartz). Then, the containers (e.g., quartz containers) in which the articles are stacked are transferred in the form of a matrix of a plurality of rows and a plurality of columns to be accommodated in a transfer container (e.g., a transfer container made of quartz) in an inspection/fabricating apparatus.
In the inspection/fabricating apparatus, the stacked article accommodated in each container is transferred to and accommodated in an inspection/fabricating apparatus, and the stacked articles accommodated in the corresponding containers (e.g., transfer containers) are inspected. The stacked articles accommodated in the corresponding containers are then transferred to a fabrication chamber in the fabricating apparatus, and the stacked articles are processed one by one.
In addition, a wafer defector (here
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